Method of Measuring the Mismatch of Parasitic Capacitance in MEMS Accelerometer Based on Regulating Electrostatic Stiffness
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DOI: 10.3390/mi9030128
Abstract: For the MEMS capacitive accelerometer, parasitic capacitance is a serious problem. Its mismatch will deteriorate the performance of accelerometer. Obtaining the mismatch of the parasitic capacitance precisely is helpful for improving the performance of bias… read more here.
Keywords: mismatch parasitic; parasitic capacitance; method measuring; measuring mismatch ... See more keywords