Deposition of c-Axis Aligned Crystalline InGaZnO by Mist Atmospheric Pressure Chemical Vapor Deposition for Thin-Film Transistor Applications
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DOI: 10.1109/ted.2020.3016633
Abstract: This study uses mist atmospheric pressure chemical vapor deposition with deposition/annealing cyclic method to grow ${c}$ -axis aligned crystalline (CAAC) InGaZnO. The material characteristics of the CAAC-InGaZnO are analyzed by X-ray diffraction, X-ray photoelectron spectroscopy,… read more here.
Keywords: mist atmospheric; vapor deposition; pressure chemical; atmospheric pressure ... See more keywords