Deep-Structured Machine Learning Model for the Recognition of Mixed-Defect Patterns in Semiconductor Fabrication Processes
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DOI: 10.1109/tsm.2018.2825482
Abstract: Semiconductor manufacturers aim to fabricate defect-free wafers in order to improve product quality, increase yields, and reduce costs. Typically, wafer defects form spatial patterns that provide useful information, helping to identify problems and faults during… read more here.
Keywords: machine learning; mixed defect; model; defect ... See more keywords