Deep-Structured Machine Learning Model for the Recognition of Mixed-Defect Patterns in Semiconductor Fabrication Processes
Sign Up to like & getrecommendations! Published in 2018 at "IEEE Transactions on Semiconductor Manufacturing"
DOI: 10.1109/tsm.2018.2825482
Abstract: Semiconductor manufacturers aim to fabricate defect-free wafers in order to improve product quality, increase yields, and reduce costs. Typically, wafer defects form spatial patterns that provide useful information, helping to identify problems and faults during… read more here.
Keywords: machine learning; mixed defect; model; defect ... See more keywords
Recognition and Classification of Mixed Defect Pattern Wafer Map Based on Multi-Path DCNN
Sign Up to like & getrecommendations! Published in 2024 at "IEEE Transactions on Semiconductor Manufacturing"
DOI: 10.1109/tsm.2024.3418520
Abstract: The semiconductor industry is the core industry of the information age. As a key link in the semiconductor industry, wafer fabrication plays a key role in its development. In the testing stage of the wafer,… read more here.
Keywords: classification; multi path; wafer map; mixed defect ... See more keywords