Miniature self-mixing interferometer based on a microsphere superlens for microactuator displacement measurement
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DOI: 10.1016/j.optcom.2021.127212
Abstract: Abstract A miniature self-mixing interferometer based on microsphere superlens (MSSL) for the displacement measurement of microactuators is proposed. The interferometer is composed of a taper multimode fiber (TMMF) and MSSL with diameter D = 5… read more here.
Keywords: microactuator; miniature self; mixing interferometer; self mixing ... See more keywords