Magnetic Trampoline Resonators Made of (La,Sr)MnO3 Single-Crystal Thin Films
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DOI: 10.1021/acssensors.5c00448
Abstract: Microelectro-mechanical resonators employing a magnetic element have been proposed for magnetic field sensing applications, but the integration of magnetic materials with standard semiconductor compounds is challenging and requires complex fabrication protocols. We present a different… read more here.
Keywords: trampoline resonators; mno3 single; thin films; resonators made ... See more keywords