Optimal design parameter estimation and analytical investigation of MEMS quadruple touch mode capacitive pressure sensor
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DOI: 10.1108/sr-06-2024-0534
Abstract: Purpose Touch mode capacitive pressure sensors (TMCPS) offer superior sensitivity and linearity in comparison to normal mode CPS and have therefore seen substantial improvements in modeling and construction. This study aims to develop a sensor… read more here.
Keywords: pressure; sensor; sensitivity; touch mode ... See more keywords
Investigation of Ring Touch Mode Capacitive Pressure Sensor With an Electrothermomechanical Coupling Contact Model
Sign Up to like & getrecommendations! Published in 2019 at "IEEE Sensors Journal"
DOI: 10.1109/jsen.2019.2926952
Abstract: Ring touch mode capacitive pressure sensor, characterized by ring stopper and stepped circular diaphragm, is developed to eliminate or greatly alleviate some disadvantages existing in conventional or small-area touch mode capacitive pressure sensor. An electrothermomechanical… read more here.
Keywords: touch mode; capacitive pressure; model; mode capacitive ... See more keywords