Investigation of Ring Touch Mode Capacitive Pressure Sensor With an Electrothermomechanical Coupling Contact Model
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DOI: 10.1109/jsen.2019.2926952
Abstract: Ring touch mode capacitive pressure sensor, characterized by ring stopper and stepped circular diaphragm, is developed to eliminate or greatly alleviate some disadvantages existing in conventional or small-area touch mode capacitive pressure sensor. An electrothermomechanical… read more here.
Keywords: touch mode; capacitive pressure; model; mode capacitive ... See more keywords