Mode localized MEMS transducers with voltage-controlled linear coupling
Sign Up to like & getrecommendations! Published in 2017 at "Journal of Micromechanics and Microengineering"
DOI: 10.1088/1361-6439/aa6652
Abstract: Recent studies have demonstrated mode localized resonant micro-electro-mechanical systems (MEMS) sensing devices with orders of magnitude improvement in sensitivity. Avoided crossings or eigenvalue veering is the physical mechanism exploited to achieve the enhancement in sensitivity… read more here.
Keywords: linear coupling; mems transducers; mode; localized mems ... See more keywords
A Closed-Loop Mode-Localized Accelerometer
Sign Up to like & getrecommendations! Published in 2018 at "Journal of Microelectromechanical Systems"
DOI: 10.1109/jmems.2017.2787544
Abstract: This paper reports a closed-loop mode-localized accelerometer for the first time. The accelerometer utilizes weakly coupled single-tine resonators as the sensing element to decrease the number of vibration modes. Based on a proposed closed-loop readout… read more here.
Keywords: tex math; closed loop; mode localized; inline formula ... See more keywords
A Low-Noise High-Order Mode-Localized MEMS Accelerometer
Sign Up to like & getrecommendations! Published in 2021 at "Journal of Microelectromechanical Systems"
DOI: 10.1109/jmems.2021.3057260
Abstract: This paper reports a precision mode-localized accelerometer operating in a higher-order flexural mode. The accelerometer consists of two symmetric resonators coupled by a central rigid coupler to generate an ultra-weak coupling factor. A reduced noise… read more here.
Keywords: mode localized; order; order mode; noise high ... See more keywords
A Novel Self-Temperature Compensation Method for Mode-Localized Accelerometers
Sign Up to like & getrecommendations! Published in 2022 at "Micromachines"
DOI: 10.3390/mi13030437
Abstract: Mode-localized sensing paradigms applied to accelerometers have recently become popular research subjects. However, the output of mode-localized accelerometers is influenced by environment temperature due to the difference in the thermal properties of the coupling resonators… read more here.
Keywords: localized accelerometers; temperature compensation; temperature; mode localized ... See more keywords
Design and Simulation Study of an Optical Mode-Localized MEMS Accelerometer
Sign Up to like & getrecommendations! Published in 2022 at "Micromachines"
DOI: 10.3390/mi14010039
Abstract: In this paper, we demonstrate a novel photonic integrated accelerometer based on the optical mode localization sensing mechanism, which is designed on an SOI wafer with a device layer thickness of 220 nm. High sensitivity… read more here.
Keywords: design simulation; optical mode; mode localized;