Design and analysis of mode-matched decoupled mass MEMS gyroscope with improved thermal stability
Sign Up to like & getrecommendations! Published in 2024 at "Measurement Science and Technology"
DOI: 10.1088/1361-6501/ad4bfd
Abstract: This paper presents an efficient design approach for microelectromechanical systems (MEMS) gyroscope considering the design constraint of MEMSCAP’s Silicon-on-Insulator Multi-User MEMS Processes (SOIMUMPs). A design for a decoupled mass MEMS resonant gyroscope with tuning electrodes… read more here.
Keywords: decoupled mass; mode matched; mems gyroscope; mass mems ... See more keywords
Deterministic aperiodic photonic crystal nanobeam supporting adjustable multiple mode-matched resonances.
Sign Up to like & getrecommendations! Published in 2018 at "Optics letters"
DOI: 10.1364/ol.43.005407
Abstract: We investigate nanocavities in deterministic aperiodic photonic crystal (PhC) nanobeams. We reveal that even a single nanocavity can support multiple mode-matched resonances, which show an almost perfect field overlap in the cavity region. The unique… read more here.
Keywords: matched resonances; mode matched; aperiodic photonic; photonic crystal ... See more keywords