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Published in 2024 at "Journal of Microelectromechanical Systems"
DOI: 10.1109/jmems.2024.3406584
Abstract: This paper presents a general instability model of mode-split MEMS gyroscopes. The proposed model can accurately predict the bias instability of a given device based on the applied angular rate and system parameters. The model…
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Keywords:
bias instability;
instability;
flicker noise;
mode split ... See more keywords