A discrete spatial model for wafer yield prediction
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DOI: 10.1080/08982112.2017.1328063
Abstract: ABSTRACT Yield analysis is one of the key concerns in the fabrication of semiconductor wafers. An effective yield analysis model will contribute to production planning and control, cost reductions and the enhanced competitiveness of enterprises.… read more here.
Keywords: wafer yield; model wafer; model; yield ... See more keywords