Modeling of interference microscopy beyond the linear regime
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DOI: 10.1117/1.oe.59.3.034110
Abstract: Abstract. Coherence scanning interferometry (CSI), a type of interference microscopy, has found broad applications in the advanced manufacturing industry, providing high-accuracy surface topography measurement. Enhancement of the metrological capability of CSI for complex surfaces, such… read more here.
Keywords: interference microscopy; microscopy; modeling interference; csi ... See more keywords