Multiscale modeling and run-to-run control of PECVD of thin film solar cells
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DOI: 10.1016/j.renene.2016.06.065
Abstract: In this work, we focus on the development of a multiscale modeling and run-to-run control framework with the purpose of improving thin film product quality in a batch-to-batch plasma-enhanced chemical vapor deposition (PECVD) manufacturing process.… read more here.
Keywords: modeling run; control; multiscale modeling; film ... See more keywords