Modification of magnetron sputter deposition of nc-WC/a-C(:H) coatings with an additional RF discharge
Sign Up to like & getrecommendations! Published in 2019 at "Diamond and Related Materials"
DOI: 10.1016/j.diamond.2019.107509
Abstract: Abstract It is known that the degree of ionization of the coating precursors is one of the key factors in a control of the structure and properties of sputter deposited carbon-based coatings. Numerous modifications of… read more here.
Keywords: modification magnetron; spectroscopy; carbon atoms; discharge ... See more keywords