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Investigation of modified Lamé mode resonator with high coupling coefficient

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Published in 2020 at "Journal of Applied Physics"

DOI: 10.1063/1.5142758

Abstract: This paper presents a modified Lame-mode resonator (MLMR) with a high, effective electromechanical coupling coefficient ( K e f f 2 ). With trapezoidal grooves introduced by etching the superficial piezoelectric material between interdigitated electrodes… read more here.

Keywords: coupling coefficient; mode; modified lam; investigation modified ... See more keywords