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Published in 2022 at "Micromachines"
DOI: 10.3390/mi13091460
Abstract: Based on a V-shaped microactuator with a pair of beams, modifications were made to the length and width of a microactuator to observe the effects. A theoretical approach and numerical characterization of the modified microactuator…
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Keywords:
shaped electrothermal;
actuator;
microactuator;
modified microactuator ... See more keywords