Scratch behavior and FEM modelling of Cu/Si(100) thin films deposited by modulated pulsed power magnetron sputtering
Sign Up to like & getrecommendations! Published in 2019 at "Surface and Coatings Technology"
DOI: 10.1016/j.surfcoat.2019.02.008
Abstract: Abstract A series of copper thin films on Si(100) substrate were deposited using the modulated pulsed power magnetron sputtering under a sputtering pressure from 0.11 to 0.70 Pa. The scratch behavior of Cu/Si(100) thin films was… read more here.
Keywords: modulated pulsed; thin films; pulsed power; scratch behavior ... See more keywords
Microstructure and thermal conductivity of Ti-Al-Si-N nanocomposite coatings deposited by modulated pulsed power magnetron sputtering
Sign Up to like & getrecommendations! Published in 2020 at "Thin Solid Films"
DOI: 10.1016/j.tsf.2019.137680
Abstract: Abstract Hard Ti-Al-Si-N coatings are widely used in cutting tools, due to their excellent mechanical properties and superior thermal properties. In this study, Ti-Al-Si-N coatings are deposited by modulated pulsed power magnetron sputtering, with various… read more here.
Keywords: nanocomposite coatings; deposited modulated; coatings deposited; thermal conductivity ... See more keywords
High-Repetition-Rate-Modulated Pulsed Fiber Laser Based on FeS2
Sign Up to like & getrecommendations! Published in 2021 at "Journal of Physical Chemistry C"
DOI: 10.1021/acs.jpcc.0c09064
Abstract: Pyrite-type ferrous disulfide (FeS2) is very suitable for ultrafast optical applications in the near-infrared field due to its appropriate band gap and high light absorption coefficient. However, n... read more here.
Keywords: high repetition; modulated pulsed; pulsed fiber; fiber laser ... See more keywords
A global plasma model for reactive deposition of compound films by modulated pulsed power magnetron sputtering discharges
Sign Up to like & getrecommendations! Published in 2017 at "Journal of Applied Physics"
DOI: 10.1063/1.4977471
Abstract: A spatially averaged, time-dependent global plasma model has been developed to describe the reactive deposition of a TiAlSiN thin film by modulated pulsed power magnetron sputtering (MPPMS) discharges in Ar/N2 mixture gas, based on the… read more here.
Keywords: plasma model; reactive deposition; power; modulated pulsed ... See more keywords