Modulation of Si on microstructure and tribo-mechanical properties of hydrogen-free DLC films prepared by magnetron sputtering
Sign Up to like & getrecommendations! Published in 2020 at "Applied Surface Science"
DOI: 10.1016/j.apsusc.2020.145381
Abstract: Abstract Modulation of Si on microstructure and tribomechanical properties of hydrogen-free DLC films was studied by preparing Si-DLC films through a hybrid HiPIMS and middle-frequency magnetron sputtering deposition technique. Atomic force microscope, scanning electron microscope,… read more here.
Keywords: modulation microstructure; properties hydrogen; hydrogen free; dlc ... See more keywords
Modulation of the microstructure, optical, and electrical properties of HfYO gate dielectrics by annealing temperature
Sign Up to like & getrecommendations! Published in 2018 at "Journal of Alloys and Compounds"
DOI: 10.1016/j.jallcom.2017.11.261
Abstract: Abstract In this study, Y-doped HfO2 (HYO) high-k gate dielectric thin films have been deposited on cleaned n-type Si wafers by using co-sputtering technique. Annealing temperature dependent structural, optical, interfacial and electrical properties of HYO… read more here.
Keywords: temperature; modulation microstructure; gate; spectroscopy ... See more keywords