Articles with "moems accelerometer" as a keyword



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A Dual-Axis MOEMS Accelerometer

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Published in 2021 at "IEEE Sensors Journal"

DOI: 10.1109/jsen.2021.3072333

Abstract: This paper is a report on the design and fabrication of a dual-axis micro-opto-electro-mechanical system (MOEMS) accelerometer. The device consists of a proof mass (PM) suspended by four L-shaped springs. Two Fabry-Pérot (FP) cavities are… read more here.

Keywords: axis; axis moems; dual axis; moems accelerometer ... See more keywords

Design and Development of a MOEMS Accelerometer Using SOI Technology

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Published in 2023 at "Micromachines"

DOI: 10.3390/mi14010231

Abstract: The micro-electromechanical system (MEMS) sensors are suitable devices for vibrational analysis in complex systems. The Fabry–Pérot interferometer (FPI) is used due to its high sensitivity and immunity to electromagnetic interference (EMI). Here, we present the… read more here.

Keywords: design development; development moems; moems sensor; design ... See more keywords