A Dual-Axis MOEMS Accelerometer
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DOI: 10.1109/jsen.2021.3072333
Abstract: This paper is a report on the design and fabrication of a dual-axis micro-opto-electro-mechanical system (MOEMS) accelerometer. The device consists of a proof mass (PM) suspended by four L-shaped springs. Two Fabry-Pérot (FP) cavities are… read more here.
Keywords: axis; axis moems; dual axis; moems accelerometer ... See more keywords
Design and Development of a MOEMS Accelerometer Using SOI Technology
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DOI: 10.3390/mi14010231
Abstract: The micro-electromechanical system (MEMS) sensors are suitable devices for vibrational analysis in complex systems. The Fabry–Pérot interferometer (FPI) is used due to its high sensitivity and immunity to electromagnetic interference (EMI). Here, we present the… read more here.
Keywords: design development; development moems; moems sensor; design ... See more keywords