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1
Published in 2021 at "IEEE Sensors Journal"
DOI: 10.1109/jsen.2021.3072333
Abstract: This paper is a report on the design and fabrication of a dual-axis micro-opto-electro-mechanical system (MOEMS) accelerometer. The device consists of a proof mass (PM) suspended by four L-shaped springs. Two Fabry-Pérot (FP) cavities are…
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Keywords:
axis;
axis moems;
dual axis;
moems accelerometer ... See more keywords
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2
Published in 2023 at "Micromachines"
DOI: 10.3390/mi14010231
Abstract: The micro-electromechanical system (MEMS) sensors are suitable devices for vibrational analysis in complex systems. The Fabry–Pérot interferometer (FPI) is used due to its high sensitivity and immunity to electromagnetic interference (EMI). Here, we present the…
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Keywords:
design development;
development moems;
moems sensor;
design ... See more keywords