A Dual-Axis MOEMS Accelerometer
Sign Up to like & getrecommendations! Published in 2021 at "IEEE Sensors Journal"
DOI: 10.1109/jsen.2021.3072333
Abstract: This paper is a report on the design and fabrication of a dual-axis micro-opto-electro-mechanical system (MOEMS) accelerometer. The device consists of a proof mass (PM) suspended by four L-shaped springs. Two Fabry-Pérot (FP) cavities are… read more here.
Keywords: axis; axis moems; dual axis; moems accelerometer ... See more keywords
μg-level bias stability of a tri-axial grating Talbot-effect-based MOEMS accelerometer.
Sign Up to like & getrecommendations! Published in 2025 at "Applied optics"
DOI: 10.1364/ao.547724
Abstract: With the advantage of high-precision and anti-electromagnetic interference, micro-opto-electro-mechanical system (MOEMS) accelerometers have significant applications in inertial navigation, the automotive industry, and attitude reference. The cross-axis interference of the accelerometer has seriously affected the accuracy… read more here.
Keywords: cross axis; axis interference; bias stability; moems accelerometer ... See more keywords
Design and Development of a MOEMS Accelerometer Using SOI Technology
Sign Up to like & getrecommendations! Published in 2023 at "Micromachines"
DOI: 10.3390/mi14010231
Abstract: The micro-electromechanical system (MEMS) sensors are suitable devices for vibrational analysis in complex systems. The Fabry–Pérot interferometer (FPI) is used due to its high sensitivity and immunity to electromagnetic interference (EMI). Here, we present the… read more here.
Keywords: design development; development moems; moems sensor; design ... See more keywords