Design and Development of a MOEMS Accelerometer Using SOI Technology
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DOI: 10.3390/mi14010231
Abstract: The micro-electromechanical system (MEMS) sensors are suitable devices for vibrational analysis in complex systems. The Fabry–Pérot interferometer (FPI) is used due to its high sensitivity and immunity to electromagnetic interference (EMI). Here, we present the… read more here.
Keywords: design development; development moems; moems sensor; design ... See more keywords