Articles with "mold roll" as a keyword



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Thin-film coating on cylinder for fabrication of cylindrical mold: Roll-to-roll nano-imprint lithography

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Published in 2019 at "Microelectronic Engineering"

DOI: 10.1016/j.mee.2019.03.004

Abstract: Abstract An optimized thin-film method for coating on a horizontal rotating cylinder is presented in this paper. The drop-casting technique is used to obtain uniform thin-film coating up to the micro/nano scale. To cover the… read more here.

Keywords: roll roll; mold roll; thin film; film ... See more keywords