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Published in 2019 at "Microelectronic Engineering"
DOI: 10.1016/j.mee.2019.03.004
Abstract: Abstract An optimized thin-film method for coating on a horizontal rotating cylinder is presented in this paper. The drop-casting technique is used to obtain uniform thin-film coating up to the micro/nano scale. To cover the…
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Keywords:
roll roll;
mold roll;
thin film;
film ... See more keywords