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Published in 2017 at "Journal of Micromechanics and Microengineering"
DOI: 10.1088/1361-6439/aa73c8
Abstract: This paper presents a technique for separating biological molecules in mixture using nanoporous silicon membrane. Nanopores were formed using electrochemical etching process (ECE) by etching a prefabricated silicon membrane in hydrofluoric acid (HF) and ethanol,…
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Keywords:
biological molecules;
silicon membrane;
molecules mixture;
nanoporous silicon ... See more keywords