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Published in 2021 at "Superconductor Science and Technology"
DOI: 10.1088/1361-6668/ac4173
Abstract: In the process of minimizing stress in sputtered molybdenum (Mo) films for fabricating transition-edge sensor devices, we have investigated correlations between the stress and film deposition parameters. At a fixed sputtering power, the tensile stress…
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Keywords:
molybdenum films;
characterizing stress;
film;
electrical properties ... See more keywords
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Published in 2023 at "Materials"
DOI: 10.3390/ma16072883
Abstract: A systematic experimental study was performed to determine laser irradiation conditions for the large-area fabrication of highly regular laser-induced periodic surface structures (HR-LIPSS) on a 220 nm thick Mo film deposited on fused silica. The…
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Keywords:
lipss;
molybdenum films;
regular lipss;
highly regular ... See more keywords