First-principles surface energies for monoclinic Ga2O3 and Al2O3 and consequences for cracking of (AlxGa1−x)2O3
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DOI: 10.1063/5.0019915
Abstract: Crack formation limits the growth of (AlxGa1−x)2O3 epitaxial films on Ga2O3 substrates. We employ first-principles calculations to determine the brittle fracture toughness of such films for three growth orientations of the monoclinic structure: [100], [010],… read more here.
Keywords: ga2o3 al2o3; monoclinic ga2o3; alxga1 2o3; first principles ... See more keywords