Influence of the deposition parameters on the texture and mechanical properties of magnetron sputtered cubic MoNx thin films
Sign Up to like & getrecommendations! Published in 2019 at "Materialia"
DOI: 10.1016/j.mtla.2018.100186
Abstract: Abstract Molybdenum nitride thin films are well known for their excellent tribological properties. In the Mo-N system different phases can be formed in dependence of the manufacturing process and the nitrogen content. Within this context,… read more here.
Keywords: monx thin; deposition parameters; thin films; influence deposition ... See more keywords