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Published in 2017 at "IEEE Electron Device Letters"
DOI: 10.1109/led.2017.2752424
Abstract: The effects of oxidants both in the channel and contact regions of MoS2 transistors are discussed through a systematic experimental study. This letter highlights the issues of partial instability in metal-organic chemical vapor deposition MoS2…
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Keywords:
improving mocvd;
performance impact;
exposure;
mocvd mos2 ... See more keywords