Monolayer MoS2 Enabled Single-Crystalline Growth of AlN on Si(100) Using Low-Temperature Helicon Sputtering
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DOI: 10.1021/acsanm.8b02358
Abstract: Growing a single-crystalline film on a substrate relies on the compatibility of crystal symmetry and lattice constant between the two materials. Such limitations can be circumvented by introducing ... read more here.
Keywords: monolayer mos2; single crystalline; mos2 enabled; crystalline growth ... See more keywords