A miniature laser diode interferometer with self-compensation of retroreflector’s motion errors for displacement feedback of small-sized micro/nano motion stages
Sign Up to like & getrecommendations! Published in 2021 at "Measurement"
DOI: 10.1016/j.measurement.2021.110172
Abstract: Abstract The effects of the retroreflector’s motion errors on the measurement accuracy of a miniature laser diode interferometer (MLDI), which is designed as a displacement feedback device for small-sized micro/nano motion stages, are investigated. A… read more here.
Keywords: motion; motion errors; compensation; interferometer ... See more keywords
Method for simultaneous measurement of five DOF motion errors of a rotary axis using a single-mode fiber-coupled laser.
Sign Up to like & getrecommendations! Published in 2018 at "Optics express"
DOI: 10.1364/oe.26.002535
Abstract: The rotary axis is the basis for rotational motion. Its motion errors have critical effects on the accuracy of the related equipment, such as a five-axis computer numerical control machine tool. There are several difficult… read more here.
Keywords: errors rotary; motion; arcsec; motion errors ... See more keywords