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Published in 2021 at "Optics express"
DOI: 10.1364/oe.415097
Abstract: Position sensing is essential to testify the validity of the mechanical design and verify the performance in micromanipulation. A practical system for non-contact micro-motion measurement of compliant nanopositioning stages and micromanipulators is proposed using computer…
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Keywords:
motion measurement;
system;
measurement system;
micro ... See more keywords