A flexure motion stage system for light beam control
Sign Up to like & getrecommendations! Published in 2018 at "Microsystem Technologies"
DOI: 10.1007/s00542-018-4168-8
Abstract: This paper presents the design of an improved tip-tilt-piston compliant/flexure motion stage for steering light beam. The motion stage is actuated by three linear stepper motors in an open-loop control. Using a laser and optical… read more here.
Keywords: flexure motion; motion stage; light beam; motion ... See more keywords
Nonlinear vibration analysis in precision motion stage with PID and time-delayed feedback controls
Sign Up to like & getrecommendations! Published in 2020 at "Nonlinear Dynamics"
DOI: 10.1007/s11071-020-05779-0
Abstract: We investigate the control of friction-induced vibration in a precision motion stage under the effect of the LuGre friction dynamics. We consider a lumped parameter model of the precision motion stage with PID and linear… read more here.
Keywords: analysis; motion stage; precision motion; motion ... See more keywords
Stability and Bifurcation Analysis of Precision Motion Stage with Nonlinear Friction Isolator
Sign Up to like & getrecommendations! Published in 2023 at "Journal of Computational and Nonlinear Dynamics"
DOI: 10.1115/1.4062266
Abstract: The application of servo-controlled mechanical-bearing-based precision motion stages (MBMS) is well-established in advanced manufacturing, semiconductor industries, and metrological applications. Nevertheless, the performance of the motion stage is plagued by self-excited friction-induced vibrations. Recently, a passive… read more here.
Keywords: bifurcation; motion stage; friction; analysis ... See more keywords
Design and testing of a novel flexure-based 3-degree-of-freedom elliptical micro/nano-positioning motion stage
Sign Up to like & getrecommendations! Published in 2017 at "Advances in Mechanical Engineering"
DOI: 10.1177/1687814017725248
Abstract: In this article, a novel flexure-based 3-degree-of-freedom elliptical micro/nano-positioning motion stage was developed to obtain translation motions along the x, y, and z directions with high working bandwidth. The stage was configurations with a XYZ… read more here.
Keywords: motion; based degree; novel flexure; motion stage ... See more keywords