Lamé Resonator Integrated With Chevron-Shaped Thermal Actuators to Improve Motional Resistance and Temperature Stability
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DOI: 10.1109/jmems.2023.3264692
Abstract: This paper presents a capacitive bulk mode resonator operating in Lamé mode, where the motional resistance and temperature stability are enhanced by implementing a set of chevron-shaped thermal actuators to reduce the transducer air gaps.… read more here.
Keywords: resistance temperature; motional resistance; temperature stability; temperature ... See more keywords