A translation micromirror with large quasi-static displacement and high surface quality
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DOI: 10.1088/0960-1317/27/1/015009
Abstract: A large displacement with high surface quality translation micromirror is presented. The micromirror consists of a magnetic actuator and a mirror plate. The actuator and the mirror plate are fabricated separately using two processes and… read more here.
Keywords: surface quality; surface; moving film; film ... See more keywords