A study on the nucleation and MPCVD growth of thin, dense, and contiguous nanocrystalline diamond films on bare and Si3N4-coated N-polar GaN
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DOI: 10.1088/1361-6641/ab4f16
Abstract: We report upon the microwave plasma chemical vapor deposition (MPCVD) growth of polycrystalline diamond on varying crystallographic orientations of GaN (Ga-polar and N-polar), as well as on Si3N4-coated N-polar GaN, as applied to top-side heat… read more here.
Keywords: si3n4 coated; polar gan; diamond films; mpcvd growth ... See more keywords