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1
Published in 2022 at "Optics express"
DOI: 10.1364/oe.473235
Abstract: Nowadays, the mid-spatial frequency (MSF) error existing in the optical surface after polishing is still a great challenge for the ultra-precision manufacturing of optical components. MSF error severely deteriorates the performances of optical components such…
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Keywords:
jet polishing;
mid spatial;
multi jet;
msf error ... See more keywords
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3
Published in 2023 at "Optics express"
DOI: 10.1364/oe.487195
Abstract: In ultra-precision optical processing, the sub-aperture polishing is prone to produce a mid-spatial-frequency (MSF) error. However, the generation mechanism of the MSF error is still not fully clarified, which seriously affects the further improvement of…
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Keywords:
msf error;
error;
pressure;
pressure distribution ... See more keywords