Temporal and spectral multiplexing for EUV multibeam ptychography with a high harmonic light source.
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DOI: 10.1364/oe.458955
Abstract: We demonstrate temporally multiplexed multibeam ptychography implemented for the first time in the EUV, by using a high harmonic based light source. This allows for simultaneous imaging of different sample areas, or of the same… read more here.
Keywords: multibeam ptychography; light source; multibeam; high harmonic ... See more keywords