High aspect ratio and damage-free multifocal femtosecond-laser stealth dicing towards wafer-scale GaN-based mini-LEDs.
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DOI: 10.1364/oe.558548
Abstract: Femtosecond laser has greatly enabled the development of high-resolution, high-aspect-ratio and damage-free nano-processing. In this study, we adopted single- and multifocal femtosecond laser stealth dicing to fabricate the on-wafer GaN-based mini-LEDs grown on sapphire. Due… read more here.
Keywords: aspect ratio; femtosecond laser; mini leds; multifocal femtosecond ... See more keywords