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Published in 2020 at "Applied Surface Science"
DOI: 10.1016/j.apsusc.2019.144951
Abstract: Abstract High reflectivity and long-term stability in multilayer mirrors (MLMs) are crucial for extreme ultraviolet (EUV) photolithography. The conventional base stack to reflect 13.5 nm light is a Mo/Si multilayer, which offers a maximum theoretical reflectivity…
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Keywords:
euv lithography;
reflectivity;
effect;
rubidium ... See more keywords
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Published in 2023 at "Journal of Physics D: Applied Physics"
DOI: 10.1088/1361-6463/acd64d
Abstract: In order to obtain mirrors with a minimum value of residual stress, periodic multilayer mirrors composed of Si/B4C were deposited by magnetron sputtering with change in pressure of sputtering Ar gas. The microstructure and phase…
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Keywords:
stress;
spectroscopy;
raman scattering;
multilayer mirrors ... See more keywords
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Published in 2017 at "Journal of Astronomical Telescopes, Instruments, and Systems"
DOI: 10.1117/1.jatis.4.1.011002
Abstract: Abstract. A simple design of a soft x-ray polarimeter using multilayer mirrors is presented. A multilayer mirror acts as a linear polarization analyzer for x-rays at incidence angles close to the Brewster angle. The instrument…
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Keywords:
multilayer mirror;
ray;
soft ray;
multilayer mirrors ... See more keywords
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Published in 2022 at "Optics express"
DOI: 10.1364/oe.448069
Abstract: The results of the investigation of the reflective characteristics of multilayer mirrors based on Ru/Y are presented. Reflection coefficients at the level of 38.5% at an operating wavelength of 9.4 nm. It is shown that…
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Keywords:
multilayer;
spectral range;
multilayer mirrors;
mirrors spectral ... See more keywords
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Published in 2017 at "Optics letters"
DOI: 10.1364/ol.42.001927
Abstract: We present an experimental comparison of several Sc-based short period multilayer mirrors including Cr/Sc with B4C barrier layers and CrNx/Sc, and we propose a new material combination that provides high reflectance in the water window…
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Keywords:
water window;
high reflectance;
reflectance;
multilayer mirrors ... See more keywords