Effect of rubidium incorporation on the optical properties and intermixing in Mo/Si multilayer mirrors for EUV lithography applications
Sign Up to like & getrecommendations! Published in 2020 at "Applied Surface Science"
DOI: 10.1016/j.apsusc.2019.144951
Abstract: Abstract High reflectivity and long-term stability in multilayer mirrors (MLMs) are crucial for extreme ultraviolet (EUV) photolithography. The conventional base stack to reflect 13.5 nm light is a Mo/Si multilayer, which offers a maximum theoretical reflectivity… read more here.
Keywords: euv lithography; reflectivity; effect; rubidium ... See more keywords
Raman scattering studies of Si/B4C periodic multilayer mirrors with operating wavelength of 13.5 nm
Sign Up to like & getrecommendations! Published in 2023 at "Journal of Physics D: Applied Physics"
DOI: 10.1088/1361-6463/acd64d
Abstract: In order to obtain mirrors with a minimum value of residual stress, periodic multilayer mirrors composed of Si/B4C were deposited by magnetron sputtering with change in pressure of sputtering Ar gas. The microstructure and phase… read more here.
Keywords: stress; spectroscopy; raman scattering; multilayer mirrors ... See more keywords
Multilayer mirror-based soft x-ray polarimeter for astronomical observations
Sign Up to like & getrecommendations! Published in 2017 at "Journal of Astronomical Telescopes, Instruments, and Systems"
DOI: 10.1117/1.jatis.4.1.011002
Abstract: Abstract. A simple design of a soft x-ray polarimeter using multilayer mirrors is presented. A multilayer mirror acts as a linear polarization analyzer for x-rays at incidence angles close to the Brewster angle. The instrument… read more here.
Keywords: multilayer mirror; ray; soft ray; multilayer mirrors ... See more keywords
Highly reflective Ru/Y multilayer mirrors for the spectral range of 9-11 nm.
Sign Up to like & getrecommendations! Published in 2022 at "Optics express"
DOI: 10.1364/oe.448069
Abstract: The results of the investigation of the reflective characteristics of multilayer mirrors based on Ru/Y are presented. Reflection coefficients at the level of 38.5% at an operating wavelength of 9.4 nm. It is shown that… read more here.
Keywords: multilayer; spectral range; multilayer mirrors; mirrors spectral ... See more keywords
High-reflectance magnetron-sputtered scandium-based x-ray multilayer mirrors for the water window.
Sign Up to like & getrecommendations! Published in 2017 at "Optics letters"
DOI: 10.1364/ol.42.001927
Abstract: We present an experimental comparison of several Sc-based short period multilayer mirrors including Cr/Sc with B4C barrier layers and CrNx/Sc, and we propose a new material combination that provides high reflectance in the water window… read more here.
Keywords: water window; high reflectance; reflectance; multilayer mirrors ... See more keywords