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Published in 2020 at "Technical Physics"
DOI: 10.1134/s1063784220110171
Abstract: Recent significant progress in the development of multilayer normal-incidence EUV mirrors is primarily related to an increase in the reflection coefficient at the working wavelength, a decrease in the spectral width of the reflection curve,…
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Keywords:
multilayer normal;
application;
normal incidence;
spectroscopy ... See more keywords