Nanoscale W/Be multilayers: Intermixing during magnetron sputtering deposition and effect of heat treatment
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DOI: 10.1016/j.apsusc.2021.151265
Abstract: Abstract An atomistic study of the W and Be mixing during magnetron sputtering deposition using the SRIM software based on the binary collision simulation by Monte Carlo method is presented. The calculations performed clearly show… read more here.
Keywords: magnetron sputtering; nanoscale multilayers; sputtering deposition; multilayers intermixing ... See more keywords