Multimode characterization of an optical-beam-deflection setup
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DOI: 10.1103/physrevapplied.22.014044
Abstract: Optical beam deflection is a popular method to measure the deformation of micromechanical devices. As it measures mostly a local slope, its sensitivity depends on the location and size of the optical spot. We present… read more here.
Keywords: multimode characterization; beam deflection; optical beam; characterization optical ... See more keywords