Multiparameter Method for Developer Screening of Molecular Glass Resists via Molecular Simulations.
Sign Up to like & getrecommendations! Published in 2024 at "ACS applied materials & interfaces"
DOI: 10.1021/acsami.4c11212
Abstract: Efficient and accurate developer screening is critical for high-resolution lithography. In this study, a multiparameter (MP) method simultaneously based on the Hansen solubility parameters (HSP), two-component solubility parameters (TSP), and order parameter (OP) is proposed… read more here.
Keywords: multiparameter method; screening molecular; molecular glass; developer screening ... See more keywords
Optimization of Eu3+ Luminescence in DMSO as a Multiparameter Method for Trace Water Detection
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DOI: 10.1021/acsomega.0c00270
Abstract: Photoluminescence of Eu3+ in DMSO is intense and ultrasensitive to water, thereby providing a novel method for water detection. Herein, for the first time, we investigated the effects of Eu3+ concentration on luminescence and developed… read more here.
Keywords: detection; water detection; water; multiparameter method ... See more keywords