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Published in 2019 at "Applied Surface Science"
DOI: 10.1016/j.apsusc.2019.04.048
Abstract: Abstract Tightly focused, highly spatially multiplexed femtosecond laser pulses, coming at sub-MHz repetition rates, were used to mask-less pattern thin plasmonic films film at ultrafast rates, approaching 25 million of microelements per second. For this…
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Keywords:
multiplexed femtosecond;
laser pulses;
femtosecond laser;
high throughput ... See more keywords