Kinetic investigation of the planar multipole resonance probe in the low-pressure plasma
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DOI: 10.1088/1361-6595/ac27bb
Abstract: Active Plasma Resonance Spectroscopy (APRS) is a well-established plasma diagnostic method: a radio frequency signal is coupled into the plasma via a probe or antenna, excites it to oscillate, and the response is evaluated through… read more here.
Keywords: plasma; probe; model; multipole resonance ... See more keywords