Multislice Imaging of Integrated Circuits by X-ray Ptychography
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DOI: 10.1017/s1431927618012552
Abstract: X-ray ptychography is a scanning type of coherent X-ray diffraction imaging based on iterative phase retrieval of multiple diffraction patterns, and provides internal information of a sample at a high spatial resolution potentially better than… read more here.
Keywords: imaging integrated; ptychography; multislice imaging; spatial resolution ... See more keywords