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Published in 2021 at "Micromachines"
DOI: 10.3390/mi12040360
Abstract: This paper proposes an electric field microsensor (EFM) with mutual shielding electrodes. Based on the charge-induction principle, the EFM consists of fixed electrodes and piezoelectric-driving vertically-movable electrodes. All the fixed electrodes and movable electrodes work…
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Keywords:
shielding electrodes;
field microsensor;
electric field;
mutual shielding ... See more keywords