Articles with "nand structures" as a keyword



Photo by threeedil from unsplash

Oxide regrowth mechanism during silicon nitride etching in vertical 3D NAND structures

Sign Up to like & get
recommendations!
Published in 2020 at "Microelectronic Engineering"

DOI: 10.1016/j.mee.2019.111191

Abstract: Abstract It is essential to selectively etch Si3N4 in the presence of SiO2 during the process of fabricating vertical 3D NAND structures. SiO2 etching inhibitors can be added to H3PO4 to increase Si3N4-to-SiO2 etch selectivity;… read more here.

Keywords: vertical nand; regrowth; sio2 etch; nand structures ... See more keywords