Stacking of nanocrystalline graphene for nano-electro-mechanical (NEM) actuator applications
Sign Up to like & getrecommendations! Published in 2018 at "Microsystem Technologies"
DOI: 10.1007/s00542-018-4180-z
Abstract: Graphene nano-electro-mechanical switches are promising components due to their excellent switching performance such as low pull-in voltage and low contact resistance. Mass fabrication with an appropriate counter electrode remains challenging. In this work, we report… read more here.
Keywords: nanocrystalline graphene; graphene nano; nano electro; stacking nanocrystalline ... See more keywords
A Nano-Electro-Mechanical Switch Based Power Gating for Effective Stand-by Power Reduction in FinFET Technologies
Sign Up to like & getrecommendations! Published in 2017 at "IEEE Electron Device Letters"
DOI: 10.1109/led.2017.2686649
Abstract: In this letter, we show that using the experimentally demonstrated nano-electro-mechanical-switches (NEMS) and our design methodology, the standby power dissipation can be reduced to negligible levels in 14-nm bulk FinFET technologies. Using two realistic NEMS… read more here.
Keywords: finfet technologies; power gating; power; nano electro ... See more keywords
Back-End-of-Line Nano-Electro-Mechanical Switches for Reconfigurable Interconnects
Sign Up to like & getrecommendations! Published in 2020 at "IEEE Electron Device Letters"
DOI: 10.1109/led.2020.2974473
Abstract: Non-volatile (NV) nano-electro-mechanical (NEM) switches are successfully implemented using multiple metallic layers in a standard 65 nm CMOS back-end-of-line (BEOL) process with no additional lithography steps. Non-volatile operation of a NEM switch as a reconfigurable… read more here.
Keywords: end line; electro mechanical; nano electro; back end ... See more keywords