Scalable fabrication and electrical contact formation process for vertically oriented silicon nanopillars in trenches
Sign Up to like & getrecommendations! Published in 2021 at "Materials Science in Semiconductor Processing"
DOI: 10.1016/j.mssp.2020.105470
Abstract: Abstract Vertical silicon nano-pillars (Si N-Pls) inside the cylindrical trenches have been fabricated as a prospective platform for the development of silicon nanowire based devices. Deep reactive ion etching (DRIE) has been used to etch… read more here.
Keywords: scalable fabrication; nano pillars; electrical contact; silicon ... See more keywords
Exploring Strategies to Contact 3D Nano-Pillars
Sign Up to like & getrecommendations! Published in 2020 at "Nanomaterials"
DOI: 10.3390/nano10040716
Abstract: This contribution explores different strategies to electrically contact vertical pillars with diameters less than 100 nm. Two process strategies have been defined, the first based on Atomic Force Microscope (AFM) indentation and the second based… read more here.
Keywords: nano pillars; exploring strategies; strategies contact; contact nano ... See more keywords
Optical and Spin Properties of NV Center Ensembles in Diamond Nano-Pillars
Sign Up to like & getrecommendations! Published in 2022 at "Nanomaterials"
DOI: 10.3390/nano12091516
Abstract: Nitrogen-vacancy (NV) color centers in diamond are excellent quantum sensors possessing high sensitivity and nano-scale spatial resolution. Their integration in photonic structures is often desired, since it leads to an increased photon emission and also… read more here.
Keywords: diamond nano; spin properties; nano pillars; optical spin ... See more keywords