Experimental evaluation of the role of oxygen on the growth of MgOx nano-sculpted thin films synthesized by reactive magnetron sputtering combined with glancing angle deposition
Sign Up to like & getrecommendations! Published in 2021 at "Thin Solid Films"
DOI: 10.1016/j.tsf.2020.138480
Abstract: Abstract In this work, we have studied the influence of oxygen on the chemistry and morphology of nano-sculpted MgOx thin films prepared by magnetron sputtering in glancing angle configuration. First, we have studied the poisoning… read more here.
Keywords: oxygen; magnetron sputtering; thin films; glancing angle ... See more keywords
Recent Advances in the Development of Nano-Sculpted Films by Magnetron Sputtering for Energy-Related Applications
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DOI: 10.3390/nano10102039
Abstract: In this paper, we overview the recent progress we made in the magnetron sputtering-based developments of nano-sculpted thin films intended for energy-related applications such as energy conversion. This paper summarizes our recent experimental work often… read more here.
Keywords: magnetron sputtering; energy related; energy; nano sculpted ... See more keywords