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Published in 2020 at "Journal of Vacuum Science and Technology"
DOI: 10.1116/1.5142858
Abstract: The authors produce plasmonic ZnO-TiN nanocomposite films by depositing plasma-synthesized ZnO nanocrystals onto a substrate and then by infilling the nanocrystal network's pores with TiN via remote plasma-enhanced atomic layer deposition (PEALD). This ZnO-TiN nanocomposite…
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Keywords:
plasmonic nanocomposites;
zinc oxide;
oxide titanium;
titanium nitride ... See more keywords