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Published in 2018 at "Nanotechnology"
DOI: 10.1088/1361-6528/aaaffa
Abstract: Germanium nanocrystals (Ge NCs) embedded in single and multilayer silicon oxide and silicon nitride matrices have been synthesized using plasma enhanced chemical vapor deposition followed by conventional furnace annealing or rapid thermal processing in N2…
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Keywords:
nanocrystals dielectric;
evolution nanocrystals;
dielectric matrices;
stress ... See more keywords
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Published in 2023 at "Nanomaterials"
DOI: 10.3390/nano13101658
Abstract: The ion-beam synthesis of Ga2O3 nanocrystals in dielectric matrices on silicon is a novel and promising way for creating nanomaterials based on gallium oxide. This research studies the regularities of changes, depending on the synthesis…
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Keywords:
chemical composition;
gallium oxide;
gallium;
dielectric matrices ... See more keywords